The Dektak® 8 Advanced Development Profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films.
The system's impressive step height repeatability and vertical range, plus its overhead gantry design, give it great versatility. And the exclusive Dektak N•Lite™ low force sensor option allows easier measurement of soft materials and characterization of sub-micron lines and spaces.
Features:
-> Combines high repeatability, low-force sensor technology, and advanced 3D data analysis
-> 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm
-> Overhead gantry design enables scan lengths to 200mm
-> N•Lite™ low force sensor option offers stylus forces down to 0.03mg
-> High aspect ratio tips ideal for measuring Shallow Trench Isolation (STI) etch depth and deep structures for MEMS research
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